Non-equilibrium or low temperature plasma processing is a powerful technology for the synthesis, deposition, modification and functionalization of materials. From semiconductor manufacturing and protective coatings to energy devices, membranes, biomedical systems and advanced packaging, low temperature plasma technology offers a unique combination of chemical versatility, low-temperature processing and precise control of surfaces and interfaces. It is a versatile and efficient approach for designing innovative materials with controlled composition, structure, interfaces and functionality and allows deposition, surface modification and nanostructuring under relatively mild conditions even on temperature-sensitive substrates. In comparison to other technologies non equilibrium plasmas are characterized by low energy consumption and waste production as well as decrease of hazardous chemicals and solvents utilization.
The challenge for the next decade will be to combine these environmental advantages with improved process efficiency and industrial scalability.