Program

Main Technology Domains

Semiconductor Technology Domain
The four speakers in the semiconductor technology domain are Antoine Kempen (ASML), Veronique de Rooij (TNO), Paul Mertens (IMEC), and Nicole Smits (ASML). They will discuss the stringent cleanliness requirements for ASML's EUV tools, addressing both molecular contamination and particulate contamination (commonly referred to as dust). 
The talks will also cover various measurement and removal methods, as well as the impact of cleanroom cleanliness on semiconductor equipment performance.
Space Technology Domain
The speakers in the space technology domain are Delphine Faye (CNES), Eleonie van Schreven (TNO), and Orcun Ergincan (ESA). They will discuss the structured approach used in the Space industry to ensure that contamination levels—both molecular and particulate—remain within the strict requirements defined at the start of the design phase for space instruments.
The talks will cover the critical product assurance steps necessary to achieve this goal. These include understanding the impact of contamination (with examples), analyzing all stages from design to operation, and measuring contamination throughout the identified steps.
Analytical Technology Domain
The two speakers in this domain, Paul Blom (VDL ETG) and Rients de Groot (Thermo Fisher Scientific), will delve into the challenges of maintaining ultra-clean vacuum conditions in analytical equipment. 
The talks will also explore the unique complexity of analytical tools, which often require ultra-high vacuum conditions in specific sections while simultaneously accommodating sample transfers from atmospheric environments.
Additionally, the speakers will highlight innovative techniques and technologies for monitoring, cleaning, and controlling contamination.
Large scale scientific instruments Technology Domain
The speakers in this domain will present on ultra-clean vacuum technologies for large-scale scientific instruments. Stefan Hanke (Karlsruhe Institute of Technology) and Luisa Spallino (INFN) will focus on the challenges associated with the Einstein Telescope, addressing the stringent vacuum requirements for the beam pipe and the specific considerations for mirrors operating at cryogenic temperatures. These systems are essential for ensuring the sensitivity and performance of this next-generation gravitational wave observatory.
Romain Ganter (PSI) will discuss his recent work on the vacuum system of the Swiss Light Source synchrotron accelerator. His talk will cover the requirements and solutions used to maintain ultra-clean vacuum conditions in synchrotron accelerator.
General Technology Domain
In the general technology domain, three speakers will address critical topics related to the creation and measurement of ultra-clean vacuum systems. Klaus Bergner (VACOM), Christian Schelle (VAT), and Valerie Derpmann (Inficon) will discuss the various aspects of designing and manufacturing ultra-clean components at large scale, as well as methods for measuring and understanding cleanliness levels.