The final aim of the course is to provide the participants with solid foundations that allow them to correctly use vacuum systems, and their components, whether they are used for industrial processes (e.g. thin film depositions) or for the implementation of analyzes and measurements (e.g. mass spectrometry).
The course is directed at laboratory technicians, researchers, industrial workers or students of scientific faculties who use systems, implants or vacuum instrumentation.
Kinetics of gases
Operating principles of low and medium vacuum pumps
Ultravacuum: Degassing, absorption pumps
The molecular regimen, the high vacuum pumps
The measurement of pressure
Materials for Vacuum Systems
Paolo Michelato, LASA – INFN Milano
Enrico Maccallini, SAES GETTERS S.p.A
Espedito Vassallo, Istituto di Fisica del Plasma CNR
Request the course