Auger electron spectroscopy is a well-established surface-sensitive technique. It has been mostly used for the identification of species on sample surfaces, especially to monitor the process of sample cleaning in high vacuum.
Compared to X-ray photoelectron spectroscopy (XPS), it is much more challenging to gather information on the chemical state of the elements on the surface from Auger spectra. Hence, XPS is a preferred tool for elemental and compositional analysis in many areas of surface science. However, with the advent of nanotechnology, the interest in spatially-resolved elemental information has been raised. In this regard, Auger electron spectroscopy can be easily turned to microscopy, offering very high spatial resolution while keeping the sensitivity to the very surface of the sample. This makes it a unique tool for nanoscale science.
During this webinar, Miroslav Kolíbal will discuss the theoretical background of Auger electron spectroscopy and microscopy, and the necessary instrumentation. In the second part, he will focus on selected applications of Auger spectroscopy utilizing a finely focused electron beam for site-specific Auger analysis.

The Webinar is organized with the participation of IUVSTA and IOP, consequently the streaming will be visible for the moment on the latter's website