Stability, Accuracy And Speed A Cost Effective Rga For General Purpose Vacuum Analysis

Residual Gas Analysis (RGA) is a routine workhorse tool for any vacuum engineer. The ability to quickly determine the individual gas partial pressures within a vacuum chamber provides a wealth of diagnostic information to help troubleshoot real and virtual leaks, identify components with abnormal out-gassing, identify contaminants and confirm when cryo-pumping and getter systems are close to needing regeneration. The e-Vision 2 RGA is one of a new range of products, from MKS, designed to meet all the traditional requirements for an RGA sensor but with data collection at speeds unachievable with previous generation technologies. The e-Vision 2 RGA is designed to provide maximum value for money. The e-Vision 2 is designed to collect data at millisecond speeds per data point even when measuring data over the full dynamic range of the RGA. This capability has been achieved without sacrificing any of the necessary robustness, reliability and support which have served to make MKS the world leader in RGA products over the widest range of applications — from semiconductor tools or particle accelerators to general industrial applications.


The e-Vision 2 is suitable for a wide range of applications including:
  • Leak detection of vacuum lines, welds and seals
  • Vacuum diagnostics
  • Pump down monitoring
  • Chamber bake out monitoring
  • Leak checking of coolant lines within a vacuum chamber
  • Chamber contaminant monitoring
  • Monitor cryo-pump performance
  • Monitor getter performance
Technology Leadership
MKS was the first company to offer an RGA compatible with modern Ethernet based web-enabled wide area network installations. The e-Vision 2 continues this development for the highest flexibility and connectivity through the use of industry standard communication hardware and software. The e-Vision 2 optimizes the roles required of a complex sensor by having two dedicated processors, one optimized, proprietary processor for data acquisition and one industry standard CE operating system processor for external communications through field proven TCP-IP technology.
The advantages of this design approach are fast, accurate data from a robust RGA sensor using industry standard, flexible communication protocols, all at the best possible value for your investment.
Hardware Performance

Field proven MKS quadrupole mass analyzers, with twin filaments as standard, ensure minimum downtime during critical diagnostic testing.
The RGA is available with an optional dual detector including a faraday detector and microchannel plate electron multiplier for detection to e-14 mbar.
Data acquisition occurs through all solid state, wide dynamic range, fast settling detector electronics. This technology prevents large peaks from causing false positive measurements on small peaks.
Temperature stabilized critical components mean that signal stability and baseline drift are improved, allowing the unit to be used without frequent recalibration if the vacuum chamber is stable but ambient air temperature fluctuates.

Software Flexibility
Built-in Web Application
A web interface using industry standard technology allows control of the e-Vision 2 as well as calibration, operation and data export through a non platform-specific web browser from anywhere on a network.
Using the ASCII protocol and TCP-IP communication, any third party software can send and receive commands and data from the e-Vision 2.
In addition to the standard, built-in web applications, software control is also available through an optional Windows application, offering the best possible fit to any customer requirement.
The field proven software provides basic RGA controls but with more functionality than the built-in web application
  • Store RGA data and recall it back into the Recall viewer
  • Annotate graphs with notes
  • Run several RGAs from one software package
leggi la scheda completa in pdf:
MKS - eVision2ds rev 11-12 - vacuum